| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for setting an alignment range whereby the time required for setting the alignment range can be reduced and man-hours of a laser emission process can be decreased. SOLUTION: The method selects a target chip 'a' among laser emission object chips RC1 to RC5 and selects the alignment range AR1 including most of the laser emission object chips RC1 to RC5 among a plurality of the alignment ranges including the target chip 'a' to generate alignment range setting data. COPYRIGHT: (C)2004,JPO
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