| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater in which the whole of the insulating base body rises in temperature in short time and temperature variations on the surface of the insulating base body are small. SOLUTION: A plurality of heating element layers 2, 3 having respectively heating element patterns 2b, 3b are provided clipping an insulating layer 1b inside the insulating base body 1 of nearly flat-plate shape that is made laminating a plurality of insulating layers 1a, 1b, 1c, so that the heating element patterns 2b, 3b of these heating element layers 2, 3 may be positioned mutually slipped in a direction parallel to the main plane of the insulating base body 1. COPYRIGHT: (C)2004,JPO
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