| 摘要 |
PROBLEM TO BE SOLVED: To easily monitor the inside of a vacuum apparatus with full sealing, without rise in cost. SOLUTION: A bundle optical fiber 41, in which optical fiber cores 42 are bundled, is applied with an adhesive, and a fixing pipe 46 is attached for bonding/fixing in airtight condition. A tubular fiber holding bracket 32 is so fixed as to communicate with a fitting hole 23 on a wall part 22 of a vacuum apparatus 21 under airtight conditions. The bundle optical fiber 41, to which the fixing pipe 46 is attached, is inserted in the fiber holding bracket 32 and the fitting hole 23. A stopper 55 is screwed in a holding bracket body 33, and the fixing pipe 46 is pressed in so that an O-ring 51 seals between the fixing pipe 46 and the holding bracket body 33. A collar 52 makes the fixing pipe 46 exert a clamping force to clamp the bundle optical fiber 41 inserted in the fixing pipe 46 for further airtightness. COPYRIGHT: (C)2004,JPO
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