VISUAL INSPECTION DEVICE AND INSPECTION METHOD FOR V GROOVE

摘要

PROBLEM TO BE SOLVED: To provide a visual inspection method and device enabling correct detection of foreign matters which are present on a surface of a V groove which is formed in a silicon substrate and on which an optical fiber is mounted. SOLUTION: The visual inspection device for inspecting an appearance of the V groove which is formed in the silicon substrate and on which the optical fiber is mounted by using a microscope is provided with a coaxial vertical illumination means and a spread illumination means installed outside. COPYRIGHT: (C)2004,JPO