| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance sensor, especially a humidity detection sensor that prevents drift deterioration from easily occurring even if they are placed under high-temperature and high-humidity environment for a long time, and is miniaturized. SOLUTION: The capacitance sensor comprises an insulating board 1 having a thermal coefficient of expansion of 1 x 10<SP>-5</SP>/°C or less, a pair of electrodes 2a, 2b that is oppositely arranged on the surface of the insulating board 1 at a specific interval, and a humidity sensitive film material 3 that is filled between the pair of electrodes 2a, 2b and buries the pair of electrodes 2a, 2b for arrangement. The pair of electrodes 2a, 2b is made of a conductive material having the thermal coefficient of expansion of 1 x 10<SP>-5</SP>/°C or less, the thickness (t) of the pair of electrodes 2a, 2b is 1 to 11μm, and spacing (d) between the pair of electrodes 2a, 2b is 0.5 to 5μm. COPYRIGHT: (C)2004,JPO
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