| 摘要 |
PROBLEM TO BE SOLVED: To provide a leakage test method which can substantially reduce the inspection time without waiting for differential pressure detection until heat dissipation or the like settles after a pressurized gas is supplied. SOLUTION: Compressed air is supplied from a compressed air source 10 to space where the first space 61 which includes a work W and the second space 61 which does not include the work are connected with each other, and then valves 30 to 32 are closed to make each of these spaces a closed system, respectively. A sensor 50 detects changes in differential pressure in a short time just after closing the valves. A differential pressure equation which includes a heat radiation characteristic term indicating an heat radiation effect after supplying the compressed air and a leakage characteristic term indicating a leakage affect of the work W, and expresses variation of the differential pressure with time is approximately set in a setting part 71 in advance. factors for each characteristic terms are determined by fitting the detected differential pressure data to the differential pressure equation, and then the leakage of the work W is judged based on the factor of the leakage characteristic term. COPYRIGHT: (C)2004,JPO
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