| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that measurement results by thermal desorption spectroscopy (TDS) do not reflect actual working conditions in the case that samples are glass for a magnetic record medium. SOLUTION: An gas analyzer by this invention is provided with a table 14 for mounting glass W; an analysis chamber 11 for housing the table 14; a vacuum pump 12 connected to the analysis chamber 11 for evacuating air from the inside of the analysis chamber 11; a pneumatic cylinder 21 having a pressure block 15 opposed to the table 14 and in the analysis chamber 11 in order to pressurize the glass W, via the pressurizing block 15, mounted to the table 14; heaters 16 each incorporated to the table 14 and the pressure blocks 15 for heating the glass W; and a quadrupole mass analyzer 24 connected to the analysis chamber 11 for analyzing gases generated from the glass W. Measurements are performed in accordance with actual conditions accompanying dynamic deformations of the glass W by pressurization. COPYRIGHT: (C)2004,JPO
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