发明名称 LASER APPLICATION METHOD
摘要 <p>A laser application method in which a linear laser beam is reflected from a mirror to bend the optical path of the laser beam, the width of the laser beam in the minor axis direction is adjusted by a minor-axis homogenizer, and the laser beam is applied to an amorphous silicon semiconductor on a light-transmitting substrate. The intensity of the laser beam is adjusted by adjusting the angle of the mirror.</p>
申请公布号 WO2004017392(A1) 申请公布日期 2004.02.26
申请号 WO2003JP10223 申请日期 2003.08.11
申请人 KABUSHIKI KAISHA TOSHIBA;MITSUHASHI, HIROSHI;MIZOUCHI, KIYOTSUGU;AWANO, TAKASHI 发明人 MITSUHASHI, HIROSHI;MIZOUCHI, KIYOTSUGU;AWANO, TAKASHI
分类号 B23K26/06;B23K26/067;B23K26/073;H01L21/20;H01L21/428;(IPC1-7):H01L21/268 主分类号 B23K26/06
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