METHOD FOR MANUFACTURING NONRADIATIVE DIELECTRIC WAVEGUIDE AND NONRADIATIVE DIELECTRIC WAVEGUIDE

摘要

A conductive film is formed on a substrate wherein an MEMS circuit has been manufactured; a dielectric A film having a low dielectric constant and a dielectric B film having a high dielectric constant are formed on the conductive film; and a conductive film is formed on the dielectric films. A millimeter wave is guided by the dielectric B film functioning as a dielectric waveguide and propagated as being reflected by the conductor.