APPARATUS FOR ANALYZING SURFACE REACTION PROCESS OF DIFFUSING MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for analyzing the surface reaction processes of diffusing materials capable of efficiently performing experiments and analyses.

SOLUTION: The apparatus for analyzing the surfaces reaction processes of the diffusing materials is provided with an occlusion chamber 1 supplied inside with hydrogen; a deuterium supply means (hydrogen supply means) 4 for supplying hydrogen to the occlusion chamber 1; a plurality of discharge chambers 5 for airtightly sandwiching and arranging samples (the diffusing materials) A capable of diffusing hydrogen between them and the occlusion chamber 1; and a plurality of analyzers 6 provided on the occlusion chambers 1; each opposed to the discharge chambers 5.

COPYRIGHT: (C)2004,JPO