| 摘要 |
PROBLEM TO BE SOLVED: To easily allow inspection by simple constitution, even in an inspecting object where confirmation of only a severe leakage is desired, and even in an inspecting object where confirmation of all the leakages is desired. SOLUTION: Compressed air 52 of a high temperature is fed to an inside of the inspecting object 60 whose leakage condition is to be confirmed, and the leakage condition is judged based on whether the compressed air 52 of the high temperature is detected in an outside of the inspecting object 60 whose leakage condition is to be confirmed. COPYRIGHT: (C)2004,JPO
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