| 摘要 |
PROBLEM TO BE SOLVED: To automatically inspect a non-metallic inclusion by switching a magnification of an objective lens of a metal microscope between two stages of a coarse inspection and a fine inspection, first dividing a field of the coarse inspection into zones corresponding to a field of the fine inspection to check the presence of a foreign matter on a metal surface sample, and next closely inspecting the zone with the foreign matter to determine whether the foreign matter is a non-metal inclusion. SOLUTION: A deviation amount between a zone area of each zone of the rough inspection and the field of the fine inspection corresponding to the zone area due to the switching of the magnification of the objective lens is previously stored in a correction data storage as correction data. The deviation amount of the field is corrected based on the correction data at the time of closely inspecting the zone determined as having the foreign matter. COPYRIGHT: (C)2004,JPO
|
