| 摘要 |
PURPOSE: A connection structure of a gas line is provided to be capable of preventing gas leakage at the connection portion between a flexible gas line and a chamber. CONSTITUTION: A gas line connection structure(110) is used for fixing a gas line(100) to a chamber. At this time, the gas line connection structure is provided with a bolt(112), a nut(114) connected with the bolt, and an O-ring type clamp(116) inserted to the fastening portion between the bolt and nut. Preferably, the gas line has flexibility. Preferably, both end portions of the O-ring type clamp are connected with each other by using fastening part(117). At this time, a bolt type structure is used as the fastening part.
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