| 摘要 |
PROBLEM TO BE SOLVED: To determine a method for determining a reference maximum-wiring-width and an efficient arrangement reference of slit dummies to minimize increases in required wiring width in a wiring method by damascene method. SOLUTION: A method capable of providing a reliable wiring with a variation in its resistance decreased comprises the steps of determining the reference maximum-wiring-width according to an allowable wiring resistance, and suppressing dishing by chemical mechanical polishing (CMP) by efficiently arranging split dummies in the wiring layer by use of the arrangement reference introduced from the reference maximum-wiring-width for the wiring width exceeding the determined reference maximum-wiring-width. COPYRIGHT: (C)2004,JPO |
