| 摘要 |
PROBLEM TO BE SOLVED: To contrive a shape measuring probe having a simple structure, having a vibration damping function capable of making a vibration converge quickly without using an actuator even when the vibration is generated in a stylus, capable of restraining the angular moment of the stylus, capable of precluding the periphery of the stylus from being fouled even when a fluid member is used, capable of making the vibration converge quickly even when generated, and capable of facilitating design and adjustment, in a contact-type shape measuring probe. SOLUTION: In this shape measuring probe for a contact needle-type shape measuring instrument for measuring the shape of the surface of the object to be measured by bringing the stylus into contact with the surface of the object, a dynamic vibration reducing mechanism is assembled inside the stylus, and the dynamic vibration reducing mechanism is constituted of an elastic force generating mechanism and a dynamic vibration reducing mechanism comprising a weight part and a damping means. COPYRIGHT: (C)2004,JPO
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