FILM THICKNESS INSPECTION DEVICE AND FILM THICKNESS INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a film thickness inspection device and a film thickness inspection method for measuring the film thickness nondestructively. SOLUTION: An object to be inspected (resistor 11 to be inspected) having a magnetic layer on the end is arranged between a generation part (transmission coil 12) of an alternating field and a reception part (reception coil 13) of the alternating field, and the change of the alternating field caused by existence of the object is detected. The thickness of the magnetic layer arranged in the layered state on the end of the object is measured based on the the change of the alternating field. COPYRIGHT: (C)2004,JPO