| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma resistant member having reinforced mechanical strength and sufficiently durable against low pressure high density plasma exposure. SOLUTION: The plasma resistant member has an yttrium aluminum garnet layer formed at least on the surface of a≥98.0% purity alumina based material to be exposed to plasma. The addition of oxide of a group IIIA element such as La<SB>2</SB>O<SB>3</SB>in periodic table enables the sintering at a low temperature as a surface layer material. The member having excellent mechanical property is obtained by bonding the alumina based base material with the surface layer through an intermediate layer of a mixture of alumina with yttrium aluminum garnet. COPYRIGHT: (C)2004,JPO
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