发明名称 MACHINING APPARATUS FOR OUTER CIRCUMFERENTIAL PART OF THIN SHEET WORK
摘要 PROBLEM TO BE SOLVED: To provide a machining apparatus for an outer circumferential part of a thin sheet work which prevents a crack of the work caused by the polishing when polishing the thin sheet work with insufficient roundness. SOLUTION: This machining apparatus is provided with: a polishing device 2 having a disk-shaped grinding wheel 3 whose outer circumferential part is a polishing surface 4; a moving device movable in the width direction of the work W and the approaching/separating direction to/from the work W, supporting the polishing device 2, and moving the polishing device 2 so that the polishing surface 4 of the grinding wheel 3 follows the outer circumferential part of the work; and a work retaining means retaining the work W and feeding the polishing object parts Wa, Wb and Wc to the polishing surface 4. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004058186(A) 申请公布日期 2004.02.26
申请号 JP20020217747 申请日期 2002.07.26
申请人 HITACHI ZOSEN CORP 发明人 KOMURA AKIO;INOUE TETSUYA;ONISHI YOSHIHIRO;KAMIKAWA KENJI
分类号 B24B9/00;H01L21/304;(IPC1-7):B24B9/00 主分类号 B24B9/00
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