发明名称 Multi-chambered continuous coating apparatus has several separate processing chambers with adjoining walls and easily replaceable circumferential seals between wall and support faces of sealing insert
摘要 The continuous coating apparatus has several separate processing chambers (1, 2) arranged in succession with adjoining walls (3,4) and seals . The walls have openings (5) and one of the openings is provided in a sealing insert (7) which is supported by a first support face (9) on the inside of the wall of one chamber and by a second support face (10) against the outside of the wall (4) of the adjoining chamber (2). A circumferential seal (13,14) is provided between each one of the two support faces and the relevant wall against which it is supported. The sealing insert is made of stainless steel.
申请公布号 DE10247002(B3) 申请公布日期 2004.02.26
申请号 DE20021047002 申请日期 2002.10.09
申请人 APPLIED FILMS GMBH & CO. KG 发明人 SAUER, ANDREAS
分类号 C23C14/56;H01L21/00;(IPC1-7):B05C15/00 主分类号 C23C14/56
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