发明名称 |
Multi-chambered continuous coating apparatus has several separate processing chambers with adjoining walls and easily replaceable circumferential seals between wall and support faces of sealing insert |
摘要 |
The continuous coating apparatus has several separate processing chambers (1, 2) arranged in succession with adjoining walls (3,4) and seals . The walls have openings (5) and one of the openings is provided in a sealing insert (7) which is supported by a first support face (9) on the inside of the wall of one chamber and by a second support face (10) against the outside of the wall (4) of the adjoining chamber (2). A circumferential seal (13,14) is provided between each one of the two support faces and the relevant wall against which it is supported. The sealing insert is made of stainless steel.
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申请公布号 |
DE10247002(B3) |
申请公布日期 |
2004.02.26 |
申请号 |
DE20021047002 |
申请日期 |
2002.10.09 |
申请人 |
APPLIED FILMS GMBH & CO. KG |
发明人 |
SAUER, ANDREAS |
分类号 |
C23C14/56;H01L21/00;(IPC1-7):B05C15/00 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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