| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that acids (H<SP>+</SP>) which remain in an anchor layer are spread in a resist layer and they affect shapes of resist protrusions after exposure and development. SOLUTION: The manufacturing method of a blank base for stamper is a method in which a cross-linkable material layer and a photoresist layer are successively formed on the surface of a base, after performing exposure by irradiating the photoresist layer with a laser beam and the photoresist layer is formed in protruded shapes by developing the photoresist layer and also by removing the non-exposed parts of the layer, the blank base for stamper is manufactured by carrying out cross-linking reaction of the protrusions and the cross-linkabe material layer and, in the method, after the cross-linkable material layer is formed, the cross-linkable material layer is exposed to the atmosphere of basic gas. COPYRIGHT: (C)2004,JPO
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