WORKING METHOD, WORKING DEVICE, AND DIFFRACTION GRATING MOLD

摘要

PROBLEM TO BE SOLVED: To highly precisely cut a groove of a diffraction grating shape and the like in a mold for molding a diffraction optical element. SOLUTION: A cutting tool 11 performs a circular motion along an arbitrary locus such as a circular and an elliptical shape by two direct-acting actuators 21 and 22 reciprocating in two shafts directions in a same period. While pseudorotating the cutting tool 11, the cutting tool 11 is relatively moved to a work W1by aθtable 1, X, Y and Z sliders 2-4, and aωY shaft 30 to cut the diffraction grating Rnon the surface of the work W1. COPYRIGHT: (C)2004,JPO