发明名称 |
Method of coating micro-electromechanical devices |
摘要 |
A method for coating a micro-electromechanical systems device with a silane coupling agent by a) mixing the silane coupling agent with a low volatile matrix material in a coating source material container; b) placing the micro-electromechanical systems device in a vacuum deposition chamber which in connection with the coating source material container; c) pumping the vacuum deposition chamber to a predetermined pressure; and maintaining the pressure of the vacuum deposition chamber for a period of time in order to chemically vapor deposit the silane coupling agent on the surface of the micro-electromechanical systems device
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申请公布号 |
US2004037956(A1) |
申请公布日期 |
2004.02.26 |
申请号 |
US20020225846 |
申请日期 |
2002.08.22 |
申请人 |
EASTMAN KODAK COMPANY |
发明人 |
YANG ZHIHAO |
分类号 |
B81B7/02;B05D7/24;B81B3/00;B81C1/00;C09D4/00;C23C14/06;(IPC1-7):C23C16/00 |
主分类号 |
B81B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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