发明名称 Methods of forming transistor gates; and methods of forming programmable read-only memory constructions
摘要 The invention includes a method of forming a transistor gate. One or more conductive materials are formed over a semiconductor substrate, and a block is formed over the one or more conductive materials. The block comprises a photoresist mass and a material other than photoresist which is against the photoresist. A pattern is transferred from the block to the one or more conductive materials to pattern a transistor gate construction from the one or more conductive materials.
申请公布号 US2004038460(A1) 申请公布日期 2004.02.26
申请号 US20030635715 申请日期 2003.08.05
申请人 SCOTT WINSTON G. 发明人 SCOTT WINSTON G.
分类号 G03F7/40;H01L21/027;H01L21/3213;H01L21/8247;H01L27/115;(IPC1-7):H01L21/336 主分类号 G03F7/40
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