| 摘要 |
PROBLEM TO BE SOLVED: To provide a film quality judging method for instantaneously detecting a change of film quality of a workpiece irrespective of the change of a reactive creature and securely reducing work failures. SOLUTION: The method includes a process for forming a film on a surface of the workpiece 12 carried into a processing chamber 16, a process for irradiating the surface of the workpiece 12 with light from a photo irradiation unit 40 during a processing on the workpiece 12 and detecting reflection light quantity by a photodetector 42, and a process for judging film quality on the surface of the workpiece 12 by a film quality judging part 44 based on detected reflection light quantity. COPYRIGHT: (C)2004,JPO
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