发明名称 Position determination system
摘要 A measurement scale (20) is movable in plane x relative to a mask (10) and photodetector (30). When a pattern of apertures in the mask (10) are in correlation with a pattern of apertures e.g. a reference mark in the scale (20) then light bands a b and c may propagate to the detector (30). The relative sizes of the patterns is such that the light bands converge at the detector (30). Other embodiments show light divergent and light inversion correlation of incongruent patterns.
申请公布号 US2004036016(A1) 申请公布日期 2004.02.26
申请号 US20020258143 申请日期 2002.10.21
申请人 HOMER MICHAEL;HOLLOWAY ALAN JAMES;GORDON-INGRAM IAIN ROBERT 发明人 HOMER MICHAEL;HOLLOWAY ALAN JAMES;GORDON-INGRAM IAIN ROBERT
分类号 G01D5/36;G01D5/38;(IPC1-7):G01D5/34 主分类号 G01D5/36
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