Measurement error correction method for correction of errors resulting from the physical properties of a measurement instrument, whereby simulation measurements are compared with actual measurements in an iterative process

摘要

Method for correction of measurement errors resulting from the physical properties of the measurement microscope itself, has the following steps: (a) conversion of a captured object image using a predefined conversion factor and measurement of the resultant image; (b) based on the optical properties of the microscope system simulation of a recording of the object and generation of simulation measurement values; (c) calculation of a difference between the measured values; (d) if the difference exceeds a threshold, repetition of steps a) - c); (e) otherwise output of the corrected measurement value.