发明名称 |
METHOD FOR PRODUCING TITANIA-DOPED FUSED SILICA EXTREME ULTRAVIOLET LITHOGRAPHY SUBSTRATES GLASS |
摘要 |
A method for producing a fused silica glass containing titania includes synthesizing particles of silica and titania by delivering a mixture of a silica precursor and a titania precursor to a burner, growing a porous preform by successively depositing the particles on a deposition surface while rotating and translating the deposition surface relative to the burner, and consolidating the porous preform into a dense glass. |
申请公布号 |
EP1390309(A1) |
申请公布日期 |
2004.02.25 |
申请号 |
EP20020723639 |
申请日期 |
2002.03.25 |
申请人 |
CORNING INCORPORATED |
发明人 |
ACKERMAN, BRADFORD G;HRDINA, KENNETH E;MOORE, LISA A;RUSSO, NIKKI J;YU, CHUNZHE C |
分类号 |
C03C4/00;G03F1/16;C03B8/04;C03B19/14;C03C3/06;C03C3/076;G02B1/00;G03F7/20;H01L21/027 |
主分类号 |
C03C4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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