| 发明名称 |
CONTACTOR CLEANING SHEET, AND CONTACTOR CLEANING METHOD |
| 摘要 |
<p>A single cleaning sheet capable of simultaneously cleaning both the tip and the side surfaces of a probe is provided. The cleaning sheet 10 is comprised of a base sheet 11, a first polishing layer 12 formed on the surface of the base sheet 11, a porous foamed layer 13 having air bubbles 15 inside formed on the surface of the first polishing layer 12, and a second polishing layer 14 formed on the surface of this foamed layer 13. <IMAGE></p> |
| 申请公布号 |
EP1391265(A1) |
申请公布日期 |
2004.02.25 |
| 申请号 |
EP20020714536 |
申请日期 |
2002.04.08 |
| 申请人 |
NIHON MICRO COATING CO., LTD. |
发明人 |
SATO, SATORU;SAKAMOTO, AKIHIRO |
| 分类号 |
G01R1/06;B08B1/00;B24B19/00;B24B19/16;B24D11/00;B24D15/00;B24D15/04;B24D18/00;B32B5/18;G01R1/067;G01R3/00;G01R31/26;(IPC1-7):B24D15/04;G01R31/28;H01L21/66 |
主分类号 |
G01R1/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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