| 摘要 |
<p>An object of the present invention is to provide a ceramic heater for a semiconductor producing/inspecting device which makes it possible to realize an even temperature distribution in a semiconductor wafer without corroding external terminals, wires and the like of the ceramic heater in the process of producing a semiconductor. The present invention is directed to a ceramic heater for a semiconductor producing/inspecting device comprising: a ceramic substrate; and a resistance heating element formed inside the ceramic substrate, wherein a power feeding terminal is exposed and formed at the outside of a wafer-heating region in the ceramic substrate. <IMAGE></p> |
