APPARATUS AND METHOD FOR DRYING SUBSTRATE

摘要

PURPOSE: A method for drying a substrate is provided to improve substrate drying efficiency by increasing the solubility of isopropyl alcohol. CONSTITUTION: A receptacle in which a cleaned substrate is received is sealed(S120). Isopropyl alcohol vapor is supplied to the inside of the receptacle to increase the pressure inside the receptacle to the atmospheric pressure or higher(S130). Moisture is eliminated from the surface of the cleaned substrate by using the pressurized isopropyl alcohol vapor(S140). The pressurized isopropyl alcohol vapor is exhausted(S150). The isopropyl alcohol vapor is supplied by using heated nitrogen gas as carrier gas.