Pattern forming method,申请号EP20010108301-传众专利搜索

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发明名称	Pattern forming method
摘要	In a pattern forming method, a trench (103) is formed on a flat base (101,102). A pattern material (105) is arranged only in and around the trench so as to project upward from the surface of the base and to be larger than the opening of the trench. The pattern material projecting from the surface of the base is removed by chemical mechanical polishing (CMP) so as to be flush with the upper surface of the base. <IMAGE>
申请公布号	EP1143506(A3)	申请公布日期	2004.02.25
申请号	EP20010108301	申请日期	2001.04.02
申请人	NIPPON TELEGRAPH AND TELEPHONE CORPORATION	发明人	ISHII, HIROMU;YAGI, SHOUJI;MACHIDA, KATSUYUKI;SAITO, KUNIO;NAGATSUMA, TADAO;KYURAGI, HAKARU
分类号	H01L21/304;H01L21/321;H01L21/768	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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