Micro-relay device

摘要

A micro-relay device is provided including a fluid non-conductor (182). A first substrate (102) and a second substrate (108) are bonded together. A channel (170) is defined in at least one of the substrates, and has a liquid metal (180) in the channel (170). Electrodes (133-135) are spaced along the channel (170) and selectively interconnectable by the liquid metal (180). An open via (151) is defined in one of the substrates and contains the fluid non-conductor (182). A heater substrate (104) includes a suspended heater element (201) in fluid communication with the open via (151). The suspended heater element (201) is operable to cause the fluid non-conductor (182) to separate the liquid metal (180). <IMAGE>