| 摘要 |
PURPOSE: A surface resistance measuring apparatus is provided to adjust a measuring position according to a size of an object to be measured and to prevent a resistance measurement value from being interrupted caused by an electric action. CONSTITUTION: A surface resistance measuring apparatus includes a surface resistance measuring section(100) including a plurality of surface resistance measuring units, an analyzing section(200) for calculating a surface resistance by receiving surface resistance data from the surface resistance measuring section(100) and a display section(300) for displaying the surface resistance value of each measuring point. A position adjusting section(400) is provided to adjust vertical and horizontal positions of an object. Measurement conditions and orders for the surface resistance measurement are inputted into an input section(500).
|
