WAFER SUPPORT UNIT

摘要

PURPOSE: A wafer support unit is provided to minimize consumption of parts and a cover ring functioning as an insulator by making a portion directly exposed to radio frequency formed of a focus ring composed of only a silicon material. CONSTITUTION: A chuck(110) supports and fixes a wafer. The focus ring(115) forms an extended area in the periphery of the chuck, disposed on the side surface of the chuck. The cover ring(120) surrounds and intercepts the chuck, disposed to contact the bottom surface of the focus ring wherein the upper portion of the cover ring is covered with the focus ring.