发明名称 |
Aluminium nitride ceramics and method for preparing the same |
摘要 |
Aluminium nitride ceramics improved in heat radiation property used as a substrate for integrated circuits and package material, comprising a sintered article consisting mainly of aluminium nitride and having a thermal conductivity higher than 100.W/m.K at room temperature and a surface layer consisting mainly of aluminium nitride or oxide glass deposited on the sintered article.A paste of aluminium nitride powder or oxide glass powder is coated on a surface of the sintered article of aluminium nitride and then is sintered to prepare a dense smooth surface layer.
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申请公布号 |
US6696103(B1) |
申请公布日期 |
2004.02.24 |
申请号 |
US19990358484 |
申请日期 |
1999.07.22 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
SHIMODA KOUHEI;KAMITAKE KAZUYA;NAKATA HIROHIKO;SASAKI KAZUTAKA;NATSUHARA MASUHIRO;UKEGAWA HARUTOSHI |
分类号 |
C04B35/581;C04B41/50;C04B41/52;C04B41/86;C04B41/87;C04B41/89;H01L21/48;H01L23/15;(IPC1-7):B05D5/00 |
主分类号 |
C04B35/581 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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