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发明名称
Catadioptric reduction projection optical system and exposure apparatus having the same
摘要
申请公布号
USRE38438(E1)
申请公布日期
2004.02.24
申请号
US20010766486
申请日期
2001.01.19
申请人
NIPPON KOGAKU KK
发明人
TAKAHASHI TOMOWAKI
分类号
G02B17/08;G03F7/20;(IPC1-7):G02B27/00
主分类号
G02B17/08
代理机构
代理人
主权项
地址
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