发明名称 Aqueous-based photolithography on organic materials
摘要 The present invention provides a process for preparing a patterned organic layer from an unpatterned water-soluble organic layer. The process includes the steps of: imagewise exposing to radiation a photosensitive unpatterned water-soluble organic layer deposited on an organic semiconducting material, a metal or an insulator layer, to produce an imagewise exposed organic layer having exposed and unexposed regions; and contacting the imagewise exposed organic layer and an aqueous-based developer to selectively remove the unexposed regions thereby producing the patterned organic layer. The present invention also provides an improved for fabricating an electronic device having a patterned organic layer adjacent to an organic semiconducting material, metal or insulator layer.
申请公布号 US6696370(B2) 申请公布日期 2004.02.24
申请号 US20010882360 申请日期 2001.06.15
申请人 THE PENN STATE RESEARCH FOUNDATION 发明人 JACKSON THOMAS N.
分类号 H01L51/00;H01L51/30;H01L51/40;(IPC1-7):H01L21/31;H01L21/469 主分类号 H01L51/00
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