Electrostatic discharge protection device for semiconductor integrated circuit, method for producing the same, and electrostatic discharge protection circuit using the same

摘要

An electrostatic discharge protection device is provided at an input or output of a semiconductor integrated circuit for protecting an internal circuit from an electrostatic surge flowing into or out of the integrated circuit. The electrostatic discharge protection device may include a thyristor, and a trigger diode for triggering the thyristor (e.g., with a low voltage). The trigger diode may include an n-type cathode high impurity concentration region; a p-type anode high impurity concentration region; and an insulator section for electrically insulating a silicide layer formed on a surface of the cathode region from another silicide layer formed on a surface of the anode region.