Leak detector for sealed optical devices

摘要

This invention discloses a method for detecting a leak from a sealed optical device. The method includes steps of: A) injecting a target gas with no performance interference to the sealed optical device for leak detection followed by sealing the sealed optical device. B) placing the sealed device in a leak testing chamber and measuring a background level of the target gas in the leak testing chamber. C) heating the sealed device to a gas-expelling temperature for expelling the target gas from the leak in the sealed optical device. And, D) detecting the target gas in a one-part-per million (PPM) range in the leak-detecting chamber for an comparing with the background level of the target gas for determining the leak in the sealed optical device.