发明名称 Plasma enhanced circuit packaging method and device
摘要 A method and apparatus for sealing a package over/around a circuit is presented. A pressurized directional flow of plasma is applied between metal bonding edges of the package and a metal surface surrounding circuitry to be enclosed in the package. During the application of plasma between the bonding surfaces, a bonding devices direct contact fusion/diffusion bonds the metal bonding edges of the package to the metal bonding surface surrounding the circuitry to be enclosed.
申请公布号 US6696661(B2) 申请公布日期 2004.02.24
申请号 US20010996038 申请日期 2001.11.19
申请人 GEOMAT INSIGHTS, LLC 发明人 BARNETT RONALD J.
分类号 B23K10/02;(IPC1-7):B23K10/00 主分类号 B23K10/02
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