发明名称 |
LASER DIODE AND FABRICATING METHOD THEREOF |
摘要 |
PURPOSE: A laser diode and a fabricating method thereof are provided to improve an interfacial characteristic and reduce leakage current by forming a current confinement layer on a selected region. CONSTITUTION: A first clad layer(12), an active layer(14), and a second clad layer(16) are sequentially grown on a substrate(11). A SiO2 layer is deposited on the second clad layer. An upper surface of the second clad layer is exposed by removing partially the SiO2 layer. A diffusion barrier is formed on the upper surface of the SiO2 layer and the exposed surface of the second clad layer. A current confinement layer(17) is formed by diffusing Si of the SiO2 layer to the second clad layer. The residual SiO2 layer and the diffusion barrier are removed therefrom. A cap layer(18) is grown thereon.
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申请公布号 |
KR100421335(B1) |
申请公布日期 |
2004.02.23 |
申请号 |
KR19960025187 |
申请日期 |
1996.06.28 |
申请人 |
INSTITUTE INFORMATION TECHNOLOGY ASSESSMENT;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, NAM HEON;KIM, SEONG HEON |
分类号 |
H01S5/30;(IPC1-7):H01S5/30 |
主分类号 |
H01S5/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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