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发明名称
摘要
申请公布号	JP3499860(B2)	申请公布日期	2004.02.23
申请号	JP20030062386	申请日期	2003.03.07
申请人		发明人
分类号	H01L21/336;H01L29/786;(IPC1-7):H01L21/336	主分类号	H01L21/336
代理机构		代理人
主权项
地址

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