发明名称 |
A method of sample preparation for atom probes and source of specimens |
摘要 |
A specimen for atom probe analysis is prepared by providing a slab of material from which the specimen will be taken; defining a plurality of posts in the slab by in the slab; removing at least one post from the slab; and mounting the post. The post is shaped to a tip shape suitable for use in the atom probe, such as by focused ion beam milling the post to a tip shape. Grooves are cross cut into the slab. If needed, each groove is filled with a supporting material prior to cutting a parallel or intersecting groove thereto. The invention is also defined as a source of specimens for use in atom probe sampling comprising a slab of material from which the specimen will be taken, which has been defined into a plurality of posts and from which slab at least one post is removed from the slab and mounted. |
申请公布号 |
AU2003257001(A8) |
申请公布日期 |
2004.02.23 |
申请号 |
AU20030257001 |
申请日期 |
2003.07.29 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
JAMES R. WISHARD;KIMBERLY KUHLMAN |
分类号 |
G01N1/06;G01N1/28;G01N1/32;G01Q70/16;(IPC1-7):G01N1/32 |
主分类号 |
G01N1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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