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发明名称
摘要
A structure comprising a trench having a liner with rounded corners in the top and bottom of the trench is obtained by rapid thermal oxidation.
申请公布号
KR100419689(B1)
申请公布日期
2004.02.21
申请号
KR20010078441
申请日期
2001.12.12
申请人
发明人
分类号
H01L21/76;H01L21/316;H01L21/762
主分类号
H01L21/76
代理机构
代理人
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