| 摘要 |
PURPOSE: A chamber for fabricating a substrate for a liquid crystal display is provided to shorten a process delay time at maximum for a transparent substrate to be heated. CONSTITUTION: A heater is installed in the inside of the chamber(110), and a susceptor is installed on an enclosed reactor region(A) and supports a transparent substrate(5) to be placed on an upper plane. The chamber includes one plane facing the transparent substrate and an inflow tube(132) receiving a gas material into the above reaction region. A number of open apertures(136) penetrate the plane. A number of transparent insulation materials(200) shield each open aperture. And a number of light emitting devices(220) supply a light toward the transparent substrate through each transparent insulation material. |
