Нормально закрытый клапан на основе трубчатого упругодеформируемого элемента

摘要

FIELD: vacuum engineering. SUBSTANCE: invention can be used as leak of gas in vacuum systems. Proposed valve contains shutoff member, seat and device pressing shutoff member to seat. Seat is made in form of tubular flexibly deformable member. Said is designed for engagement with shutoff member and it has in cross section figure symmetrical relative to its two perpendicular axes. Larger axis coincides with direction of travel of shutoff member when it is pressed to seat. Invention is aimed at increasing speed of response of valve at simultaneous provision of accuracy of flow control and prevention of contamination of vacuum by particles of microwear. EFFECT: improved convenience of automation. 5 cl, 2 dwg