| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of recycling a substrate placement table, by which a substrate placement member can be recycled without being disposed and hence no inconvenience by the disposal is caused. SOLUTION: The substrate placement member is a location to place a substrate W thereon in substrate processing equipment 1 for processing the substrate W, and comprises a base member, an electrostatic chuck for chucking the substrate which is located on the base member, and an organic adhesive layer for bonding the base member and the electrostatic chuck together. In recycling the substrate placement member, the substrate placement member is unmounted from the substrate processing equipment when it is replaced with a new one (STEP 1), and the adhesive layer is removed to separate the base member and the electrostatic chuck (STEPS 2 and 4), and then the base member and/or the electrostatic chuck is recycled (STEP 5). COPYRIGHT: (C)2004,JPO |
