| 摘要 |
PROBLEM TO BE SOLVED: To provide an analysis apparatus for measuring and evaluating molecules etc. desorbed from a member by ultraviolet irradiation. SOLUTION: The analysis apparatus is provided with a vacuum container 101 where at least a sample 102 is disposed, an ultraviolet ray generator 104 and a mass spectrometer 107. In the analysis apparatus, ultraviolet rays guided from the ultraviolet ray generator 104 are radiated to a surface of the sample 102 disposed in the vacuum container 101, and an emitted object comprising at least atoms, molecules and charged particles emitted from the sample 102 is collected, guided to the mass spectrometer 107 and analyzed. A material attached and adsorbed to the sample 102 and not emitted from the sample 102 by only heating is desorbed from the sample 102 by the ultraviolet irradiation and guided to the mass spectrometer 107, and can be measured and analyzed. COPYRIGHT: (C)2004,JPO
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