发明名称 |
MICROELECTRONIC CLEANING COMPOSITIONS CONTAINING OXIDIZERS AND ORGANIC SOLVENTS |
摘要 |
Cleaning compositions suitable for cleaning microelectronic structures having silicon dioxide, low-k or high-k dielectrics and copper or aluminum metallizations contain an oxidizing agent and a polar organic solvent selected from amides, sulfones, sulfolenes, selenones and saturated alcohols, and optionally other components. |
申请公布号 |
WO03104900(A3) |
申请公布日期 |
2004.02.19 |
申请号 |
WO2003US16828 |
申请日期 |
2003.05.27 |
申请人 |
MALLINCKRODT BAKER INC.;HSU, CHIEN-PIN, SHERMAN |
发明人 |
HSU, CHIEN-PIN, SHERMAN |
分类号 |
C11D1/00;C11D3/20;C11D3/24;C11D3/28;C11D3/33;C11D3/34;C11D3/39;C11D7/06;C11D7/26;C11D7/28;C11D7/32;C11D7/34;C11D7/50;C11D11/00;C23G1/06;G03F7/42;H01L21/02;H01L21/027;H01L21/304;H01L21/311 |
主分类号 |
C11D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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