| 摘要 |
A method of effectively developing an adhesive (R) in a storage disc (D) and capable of differentiating a suction force applied from a surface of a rotary holding table (X) from a drawing force applied from a boss (1). The method comprises sucking and holding a storage disc composed of two disc-shaped resin substrates (D1 and D2) each having a central hole, and the adhesive (R) interposed therebetween, the storage disc (D) being placed on the rotary holding table (X), inserting a boss (1) of the rotary holding table (X) into the central holes of the two disc-shaped resin substrates (D1 and D2) so as to suck and rotate the storage disc (D), and individually providing a suction passage (A) for sucking and holding the storage disc (D) and a drawing passage (B) for drawing the adhesive (R) by way of the boss (1). <IMAGE> |
